Microfabrication

Microfabrication

Details

The work of the EMPIRe group includes investigatin the challenging areas of Microfabrication, from device design to microstructure testing. KAUST has been provided with a wide range of top of the class Micro and Nano Tenchology tools.

Our Core Labs include a Class 100 cleanroom, a controlled environment in which all types of particulates and contaminant are minimized. The controlled environment is essential for processes that require a high degree of cleanliness.

Also, our group fabricates microstructures (actuators, cantilvers, sensors, lenses, micro-channels, etc), using surface micromachining technology to investigate polymer based MEMS.